Aerotech ABL1500 直線電機驅動空氣軸承平臺在垂直表面和水平表面一并采用了有效的預緊處理。它可提供突出的高剛性，是重載和偏置負載應用的理想選擇。內置的BLMC 系列無刷直線伺服電機采用了零齒槽效應的無鐵芯結構，無吸引力，提供非常的平滑運動。
● 設計用于高性能的掃描和檢查
● 兼容450毫米晶圓
● 所有空氣軸承表面采用主動空氣預緊
● 線性編碼器反饋提供亞納米級分辨率
● 可承受重載荷的高剛性和優秀的幾何性能
● 行程達500mm
● 行程范圍: 50 mm 100 mm 200 mm 300 mm 400 mm 500 mm
● 驅動系統: 無刷直線伺服電機 (BLMC-192-A)
● 反饋: 非接觸直線編碼器(LN or LT)
● 分辨率: LN 0.001 μm -0.2 μm
LT 0.005 μm -1.0 μm
● 行程速度: 2 m/s (80 in/s)
● 直線加速度: 2 g -20 m/s2 (無負載)
● 負載: 35.0 kg
● 連續保持推力: 93.6 N
● 峰值推力: 542.8 N
● 全行程精度: ±0.2 μm ~ ±20.0 μm
● 重復定位精度: ±0.1 μm~±0.3 μm
● 直線度和平面度: 偏差 ±0.25 μm ~ ±2.0 μm
● 傾斜度/滾擺/偏擺: ±0.5 arc sec ~ ±5 arc sec
● 空氣軸承工作壓力: 80 psi (5.5 bar) ±5 psig (0.3 bar)
● 空氣消耗量: <2 scfm
● 平臺質量: 14.7 kg ~ 26.5 kg
● 運動部件質量: (無負載) 5.1 kg
● 材料：鋁
空氣軸承設計實現高動態性能
The ABL1500 incorporates an air-on-air preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.
Proprietary manufacturing techniques result in a stage with unsurpassed geometric characteristics. The air bearing has an inherent averaging effect that maximizes performance. The thin film will fill small surface voids and allow for other irregularities. This characteristic yields superior pitch, roll, yaw, straightness and flatness specifications.
直線電機驅動
The driving force behind this stage is Aerotech’s BLMC series brushless linear servomotor. Aerotech’s long history and experience as a motor manufacturer is reflected in this design. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed smoothness of motion. Capable of generating high force and velocity, the BLMC represents the ultimate combination of power and performance.
零維護
Our totally noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL1500 experiences no wear or reduction in performance over time. Service life is virtually unlimited and since there is no lubrication – only clean, dry gas – air bearings are ideal for cleanroom and medical applications.
電纜管理
We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech’s modular design makes cable replacement quick and easy with minimal downtime. We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate integration into the final system. Both ends are fully connectorized for simple integration into the customer’s machine.
